 Larger View
Dopant Mapping in Semiconductors
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The industry responsible for - and driven by - Moore's Law continues its relentless pursuit of perfecting devices with atomic level tolerances. Proposed
application for the LEAP® Microscope draw upon its particular suitability for:
- Mapping dopants in ultra-shallow junction transistors
- Analyzing sidewall step coverage of Ti/TiN glue layers
- Determining the extent of salicidation
"Mapping dopants has been the industry Holy Grail for the past 30 years." - NSF Microscopy Panel
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