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  Home >> Applications >> Semiconductors
 
Semiconductors
Example Applications

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Dopant Mapping in Semiconductors

The industry responsible for - and driven by - Moore's Law continues its relentless pursuit of perfecting devices with atomic level tolerances. Proposed application for the LEAP® Microscope draw upon its particular suitability for:

  • Mapping dopants in ultra-shallow junction transistors
  • Analyzing sidewall step coverage of Ti/TiN glue layers
  • Determining the extent of salicidation

"Mapping dopants has been the industry Holy Grail for the past 30 years." - NSF Microscopy Panel

 
 
 
 
 
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